R.F. Pierret, Semiconductor Fundamentals, Addison- Wesley, Reading, MA, 1988 . ... Tabata, R. Asahi, H. Funabashi, K. Shimaoka, and S. Sugiyama, aquot;Anisotropic Etching of Silicon in TMAH solutions, aquot; Sensors and Actuators A, vol. 34, pp. 51-57 ... [27] J.A. Calviello, aquot;Advanced Devices and Components for the Millimeter 169.
Title | : | MMIC passive and active structures |
Author | : | Ioannis Papapolymerou |
Publisher | : | - 1999 |
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